| 测量面垂直度 | 测量面直线度 | 相对测量面平行度 | |||
| 精度等级(um) | |||||
| 00 | 0 | 00 | 0 | 00 | 0 |
160×160 | 2 | 4 | 0.8 | 1.7 | 2 | 4 |
200×200 | 2 | 4 | 0.9 | 1.8 | 2 | 4 |
250×250 | 2.2 | 4.5 | 1 | 2 | 2.2 | 4.5 |
300×300 | 2.6 | 5.2 | 1.1 | 2.3 | 2.6 | 5.5 |
400×400 | 3 | 6 | 1.3 | 2.6 | 3 | 6 |
500×500 | 3.5 | 7 | 1.5 | 3 | 3.5 | 7 |
600×600 | 4.5 | 9 | 2 | 4 | 4.5 | 9 |
800×800 | 5 | 10 | 3 | 6 | 5 | 10 |
1000×1000 | 6 | 12 | 4 | 8 | 6 | 12 |